Epitaxial growth of Y-doped SrZrO3 films on MgO by pulsed laser deposition

نویسندگان

  • L. Beckers
  • F. Sanchez
  • J. Schubert
  • W. Zander
چکیده

Epitaxial thin films of Y-doped SrZrO3 have been grown on MgO~001! by pulsed laser deposition. The deposition process has been performed at temperatures of 1000–1200 °C and at an oxygen pressure of 1.5310 mbar. The samples are characterized by Rutherford backscattering spectrometry/channeling ~RBS/C! and x-ray diffraction ~XRD!. We found an epitaxial relationship of SrZrO3 (0k0) @101#iMgO ~001! @100#. Good crystalline quality is confirmed by RBS/C minimum yield values of 9% and a FWHM of 0.35° of the XRD rocking curve. © 1996 American Institute of Physics. @S0021-8979~96!09705-1#

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تاریخ انتشار 1996